Finite Element Analysis of a Flexure Based Ultrasonic motor

The ineluctable change to micro and subsequently nano has engendered the need for precision control and actuation. With Piezoelectric technology at the heart, a new type of motor is improving small-scale motion systems in a big way. In the following study a novel design of a travelling-wave-type motor based on flexural excitations (d-15 effect) is analyzed using finite element method. The objective of the study is to give a method to accurately estimate the frequency of the driving voltage for any given actuator geometry and electrode width. The study shows that a reasonably accurate result can be found by studying the nature of vibrations produced on the stator surface alone. Thus, the characteristics of these vibrations may be used to predict the optimal operating frequency to produce desirable motor characteristics.